Effect of curvature and electrode coverage on the quality factor of biconvex ALN-on-Si MEMS resonators
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
Fingerprint
???publication_fingerprints_help???
Engineering & Materials Science
Physics & Astronomy
Engineering
General
Physics
Aerospace Sciences
Chemical Compounds
Research OutputsResearch Output authored by Effect of curvature and electrode coverage on the quality factor of biconvex ALN-on-Si MEMS resonators is tagged with the concept
Find experts having the same concept
