Effect of curvature and electrode coverage on the quality factor of biconvex ALN-on-Si MEMS resonators
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 98-101 |
| ISBN (Electronic) | 978-1-5386-2732-7 |
| ISBN (Print) | 9781538627310 |
| Publication status | Published - Jun 2017 |
Conference
| Title | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 |
|---|---|
| Location | Kaohsiung Exhibition Center |
| Place | Taiwan |
| City | Kaohsiung |
| Period | 18 - 22 June 2017 |
Link(s)
Abstract
This paper analyzes for the first time the effect of incrementally varying the curvature of a MEMS contour mode resonator on its quality factor (Q). The change in curvature is analyzed in terms of the change in width of the acoustic cavity. Our experimental results show that the change in width of the acoustic cavity should be at least half the acoustic wavelength (λ) of the resonant cavity to achieve optimal and consistent improvement in Q. However, curving beyond λ drastically reduces coupling while providing little improvement in Q. We also examine the impact of electrode coverage for Q-enhanced biconvex resonators: Narrowing the width of the electrodes tends to increase Q but shortening the length reduces Q slightly.
Research Area(s)
- anchor loss, contour mode, Piezoelectric-on-silicon, quality factor, resonators
Citation Format(s)
Effect of curvature and electrode coverage on the quality factor of biconvex ALN-on-Si MEMS resonators. / Siddiqi, Muhammad Wajih Ullah; Tu, Cheng; Lee, Joshua E.-Y.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 98-101 7993997.Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
