Effect of Bias on DC-RF Hybrid Discharge and Surface Properties of DLC Film Deposited on the Inner Wall of Cylindrical PET Barrel

X B TIAN; J LI; L TIAN; C Z GOND; S Q YANG; Paul CHU

Effect of Bias on DC-RF Hybrid Discharge and Surface Properties of DLC Film Deposited on the Inner Wall of Cylindrical PET Barrel

X B TIAN
, J LI
, L TIAN
, C Z GOND
, S Q YANG
, Paul CHU

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 13 Sept 2009
Event	16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009) - Tokyo, Japan Duration: 13 Sept 2009 → 18 Sept 2009

Conference

Conference	16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009)
Place	Japan
City	Tokyo
Period	13/09/09 → 18/09/09

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@conference{d0755201b19b4103a1e596eb7644f98d,

title = "Effect of Bias on DC-RF Hybrid Discharge and Surface Properties of DLC Film Deposited on the Inner Wall of Cylindrical PET Barrel",

author = "TIAN, \{X B\} and J LI and L TIAN and GOND, \{C Z\} and YANG, \{S Q\} and Paul CHU",

year = "2009",

month = sep,

day = "13",

language = "English",

note = "16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009) ; Conference date: 13-09-2009 Through 18-09-2009",

}

Effect of Bias on DC-RF Hybrid Discharge and Surface Properties of DLC Film Deposited on the Inner Wall of Cylindrical PET Barrel. / TIAN, X B; LI, J; TIAN, L et al.
2009. Paper presented at 16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009), Tokyo, Japan.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Effect of Bias on DC-RF Hybrid Discharge and Surface Properties of DLC Film Deposited on the Inner Wall of Cylindrical PET Barrel

AU - TIAN, X B

AU - LI, J

AU - TIAN, L

AU - GOND, C Z

AU - YANG, S Q

AU - CHU, Paul

PY - 2009/9/13

Y1 - 2009/9/13

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009)

Y2 - 13 September 2009 through 18 September 2009

ER -