Dry Etching Induced Damage on Vertical Sidewalls of GaAs Channels

S. W. Pang, W. D. Goodhue, T. M. Lyszczarz, D. J. Ehrlich, R. B. Goodman, G. D. Johnson

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Fingerprint

Dive into the research topics of 'Dry Etching Induced Damage on Vertical Sidewalls of GaAs Channels'. Together they form a unique fingerprint.

Engineering

Material Science