@conference{ae53fbeaba6742b08a494306c056c845,
title = "Distribution of Ion Dose and Incident Angles in Plasma Implantation of Precision Molds",
author = "Xin Wang and Fu, {Ricky K. Y.} and Huang, {Y. X.} and Yang, {S. Q.} and Chu, {Paul K.}",
note = "Information for this record is supplemented by the author(s) concerned.; 2nd International Conference on Technological Advances of Thin Films and Surface Coatings (Thin Films 2004) ; Conference date: 13-07-2004 Through 17-07-2004",
year = "2004",
month = jul,
language = "English",
}