Distribution of Ion Dose and Incident Angles in Plasma Implantation of Precision Molds

Xin Wang, Ricky K. Y. Fu, Y. X. Huang, S. Q. Yang, Paul K. Chu

    Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review

    Original languageEnglish
    Publication statusPublished - Jul 2004
    Event2nd International Conference on Technological Advances of Thin Films and Surface Coatings (Thin Films 2004) - , Singapore
    Duration: 13 Jul 200417 Jul 2004

    Conference

    Conference2nd International Conference on Technological Advances of Thin Films and Surface Coatings (Thin Films 2004)
    Country/TerritorySingapore
    Period13/07/0417/07/04

    Bibliographical note

    Information for this record is supplemented by the author(s) concerned.

    Cite this