Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method

Lei Miao; Zaili Dong; Hoyin Chan

doi:10.1109/wcica.2004.1342198

Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method

Lei Miao
, Zaili Dong
, Hoyin Chan

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

5 Citations (Scopus)

Abstract

With the maturing design of micro electrical mechanism systems, the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Twenty-three under-water images of the micro actuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved.

Original language	English
Title of host publication	WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings
Pages	3800-3804
Volume	5
DOIs	https://doi.org/10.1109/wcica.2004.1342198
Publication status	Published - Jun 2004
Externally published	Yes
Event	5th World Congress on Intelligent Control and Automation, WCICA 2004 - Hangzhou, China Duration: 15 Jun 2004 → 19 Jun 2004

Publication series

Name	Proceedings of the World Congress on Intelligent Control and Automation (WCICA)

Conference

Conference	5th World Congress on Intelligent Control and Automation, WCICA 2004
Abbreviated title	WCICA 2004
Place	China
City	Hangzhou
Period	15/06/04 → 19/06/04

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Miao, L., Dong, Z., & Chan, H. (2004). Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method. In WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings (Vol. 5, pp. 3800-3804). (Proceedings of the World Congress on Intelligent Control and Automation (WCICA)). https://doi.org/10.1109/wcica.2004.1342198

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title = "Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method",

abstract = "With the maturing design of micro electrical mechanism systems, the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Twenty-three under-water images of the micro actuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved.",

author = "Lei Miao and Zaili Dong and Hoyin Chan",

year = "2004",

month = jun,

doi = "10.1109/wcica.2004.1342198",

language = "English",

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series = "Proceedings of the World Congress on Intelligent Control and Automation (WCICA)",

pages = "3800--3804",

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note = "5th World Congress on Intelligent Control and Automation, WCICA 2004, WCICA 2004 ; Conference date: 15-06-2004 Through 19-06-2004",

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Miao, L, Dong, Z & Chan, H 2004, Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method. in WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings. vol. 5, Proceedings of the World Congress on Intelligent Control and Automation (WCICA), pp. 3800-3804, 5th World Congress on Intelligent Control and Automation, WCICA 2004, Hangzhou, China, 15/06/04. https://doi.org/10.1109/wcica.2004.1342198

Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method. / Miao, Lei; Dong, Zaili; Chan, Hoyin.
WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings. Vol. 5 2004. p. 3800-3804 (Proceedings of the World Congress on Intelligent Control and Automation (WCICA)).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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T1 - Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method

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AU - Dong, Zaili

AU - Chan, Hoyin

PY - 2004/6

Y1 - 2004/6

N2 - With the maturing design of micro electrical mechanism systems, the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Twenty-three under-water images of the micro actuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved.

AB - With the maturing design of micro electrical mechanism systems, the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Twenty-three under-water images of the micro actuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved.

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U2 - 10.1109/wcica.2004.1342198

DO - 10.1109/wcica.2004.1342198

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-8273-0

VL - 5

T3 - Proceedings of the World Congress on Intelligent Control and Automation (WCICA)

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BT - WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings

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ER -

Miao L, Dong Z, Chan H. Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method. In WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings. Vol. 5. 2004. p. 3800-3804. (Proceedings of the World Congress on Intelligent Control and Automation (WCICA)). doi: 10.1109/wcica.2004.1342198

Displacement Measurement of A Thermally Actuated Polymer Micro Robotic Gripper Using The Optical Focus Method

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