Discharge and Deposition Characteristics of High-Power Impulse Magnetron Sputtering Using Various Target Materials

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Bocong Zheng
  • Zhongzhen Wu
  • Suihan Cui
  • Shu Xiao
  • Liangliang Liu
  • Hai Lin
  • Ricky K. Y. Fu
  • Xiubo Tian
  • Feng Pan

Detail(s)

Original languageEnglish
Pages (from-to)193-198
Journal / PublicationIEEE Transactions on Plasma Science
Volume47
Issue number1
Online published13 Dec 2018
Publication statusPublished - Jan 2019

Abstract

The discharge and deposition characteristics of high-power impulse magnetron sputtering using various target materials with different sputtering yields (Cu, Cr, Ti, and C) were analyzed by a plasma global model. The experimental discharge voltages and currents of various target materials were used as the input parameters of the model. The analysis reveals that the ionization fraction of the sputtered species decreases as increasing the sputtering yield, due to the electron temperature was reduced through the cooling effect of sputtered species. However, as the sputtering yield increases, the plasma density under a given discharge power density is increased and the self-sputtering runaway can be fully developed, resulting in a higher fraction of ion density in the form of metal ions in the ion deposition flux. For some high-sputtering yield materials, such as Cu and Cr, this fraction can be up to 95%.

Research Area(s)

  • Carbon, chromium, copper, modeling, plasmas, sputtering, titanium.

Citation Format(s)

Discharge and Deposition Characteristics of High-Power Impulse Magnetron Sputtering Using Various Target Materials. / Zheng, Bocong; Wu, Zhongzhen; Cui, Suihan; Xiao, Shu; Liu, Liangliang; Lin, Hai; Fu, Ricky K. Y.; Tian, Xiubo; Pan, Feng; Chu, Paul K.

In: IEEE Transactions on Plasma Science, Vol. 47, No. 1, 01.2019, p. 193-198.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review