Direct nanofabrication and transmission electron microscopy on a suite of easy-to-prepare ultrathin film substrates

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Daniel B. Allred
  • Melvin T. Zin
  • Hong Ma
  • Mehmet Sarikaya
  • François Baneyx
  • Daniel T. Schwartz

Detail(s)

Original languageEnglish
Pages (from-to)5341-5347
Journal / PublicationThin Solid Films
Volume515
Issue number13
Publication statusPublished - 7 May 2007
Externally publishedYes

Abstract

A high-yield, easy to master method for preparing electron transparent metal, oxide, and carbon ultrathin film substrates suitable for direct nano/micro-fabrication and transmission electron microscopy (TEM) is presented. To demonstrate the versatility of these substrates for fabrication processes, we use e-beam lithography, self-assembled colloidal and protein templates, and microcontact printing to create patterned masks for subsequent electrodeposition of two dimensional and three dimensional structures. The electrodeposited structures range in scale from a few nanometers to a few micrometers in characteristic dimensions. Because fabrication occurs directly on ultrathin films, TEM analysis of the resulting materials and buried interfaces is straightforward without any destructive sample preparation. We show that all the normal TEM analytical methods (imaging, diffraction, electron and X-ray spectroscopies) are compatible with the fabricated structures and the thin film substrates. These electron transparent substrates have largely rendered the need for TEM sample preparation on fabricated structures obsolete in our lab. © 2007 Elsevier B.V. All rights reserved.

Research Area(s)

  • Electrodeposition, Electron transparent, Lithography, Metal films, Protein, Template, Transmission electron microscopy (TEM)

Citation Format(s)

Direct nanofabrication and transmission electron microscopy on a suite of easy-to-prepare ultrathin film substrates. / Allred, Daniel B.; Zin, Melvin T.; Ma, Hong; Sarikaya, Mehmet; Baneyx, François; Jen, Alex K.-Y.; Schwartz, Daniel T.

In: Thin Solid Films, Vol. 515, No. 13, 07.05.2007, p. 5341-5347.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review