TY - JOUR
T1 - Direct imprint of nanostructures in metals using porous anodic alumina stamps
AU - Lang, Xianzhong
AU - Qiu, Teng
AU - Long, Kailin
AU - Han, Di
AU - Nan, Haiyan
AU - Chu, Paul K.
PY - 2013/6/28
Y1 - 2013/6/28
N2 - A single-step nanoimprint process for direct patterning of metallic nanostructures at room temperature is described. Porous anodic alumina (PAA) is used for stamps and the structure can be optimized by adjusting the PAA fabrication parameters. The periodic hexagonal cells on the PAA stamps are transferred to the metals by mechanically pressing the stamps into the substrate, and various metal nanopatterns with different hardnesses and elastic moduli such as Sn, Zn, Al, Ag, Mg and Cu are fabricated. Metal nanopits or nanoislands with well defined spacing between 75 and 150 nm can be readily produced using the metal direct imprinting process. The mechanical properties of the PAA stamps and effects of imprinting pressure on the height of the transferred patterns are also investigated. © 2013 IOP Publishing Ltd.
AB - A single-step nanoimprint process for direct patterning of metallic nanostructures at room temperature is described. Porous anodic alumina (PAA) is used for stamps and the structure can be optimized by adjusting the PAA fabrication parameters. The periodic hexagonal cells on the PAA stamps are transferred to the metals by mechanically pressing the stamps into the substrate, and various metal nanopatterns with different hardnesses and elastic moduli such as Sn, Zn, Al, Ag, Mg and Cu are fabricated. Metal nanopits or nanoislands with well defined spacing between 75 and 150 nm can be readily produced using the metal direct imprinting process. The mechanical properties of the PAA stamps and effects of imprinting pressure on the height of the transferred patterns are also investigated. © 2013 IOP Publishing Ltd.
UR - http://www.scopus.com/inward/record.url?scp=84878665133&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84878665133&origin=recordpage
U2 - 10.1088/0957-4484/24/25/255303
DO - 10.1088/0957-4484/24/25/255303
M3 - RGC 21 - Publication in refereed journal
SN - 0957-4484
VL - 24
JO - Nanotechnology
JF - Nanotechnology
IS - 25
M1 - 255303
ER -