Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation
- Chunzhi Gong
- , Xiubo Tian
- , Shiqin Yang
- , Ricky K.Y. Fu
- , Paul K. Chu
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
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