Diffusion of Cathodic Arc Plasma in a Magnetic Filter

Tao Zhang, Paul K. Chu*, Ian G. Brown

*Corresponding author for this work

    Research output: Journal Publications and ReviewsRGC 22 - Publication in policy or professional journal

    Abstract

    A model based on Bohm diffusion is developed to investigate the optimal bias of a magnetic filter used in conjunction with a cathodic arc plasma source. Details regarding the derivation of the model as well as experimental results to corroborate the model are presented. According to the model, the optimal bias at which the magnetic duct produces the maximum plasma output is related to the ion speed, ion mass, ion charge state, and plasma density in the filter. Even though the magnetic field is taken into account, it is not a variable in the final equation. Our experimental results confirm that the magnetic field has almost no influence on the optimal bias when the magnetic field is above 400G. The presented work enhances our understanding on the mechanism of plasma transport through the magnetic duct.
    Original languageEnglish
    JournalIEEE International Conference on Plasma Science
    DOIs
    Publication statusPublished - 2003
    Event2003 IEEE International Conference on Plasma Science - Jeju, Korea, Republic of
    Duration: 2 Jun 20035 Jun 2003

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