@article{f280abecc5fa46b390cd4618a5754df4,
title = "Diffusion of arsenic along dislocations in epitaxial silicon films",
author = "Campbell, {David R.} and Tu, {K. N.} and Schwenker, {Robert O.}",
note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to
[email protected].",
year = "1975",
month = jan,
doi = "10.1016/0040-6090(75)90257-6",
language = "English",
volume = "25",
pages = "213--220",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "1",
}