Development of the Industrial Prototype of the Plasma Immersion Ion Implantation

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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Author(s)

  • Bao-yin Tang
  • Song-yan Wang
  • Shi-qin Yang
  • Ya Gau
  • Xu-ehu Zeng

Detail(s)

Original languageEnglish
Publication statusPublished - Feb 1995

Workshop

Title2nd International Workshop on Plasma-Based Ion Implantation (PBII2)
PlaceAustralia
CitySydney
Period12 - 15 February 1995

Citation Format(s)

Development of the Industrial Prototype of the Plasma Immersion Ion Implantation. / Tang, Bao-yin; Wang, Song-yan; Yang, Shi-qin; Chu, Paul K.; Gau, Ya; Zeng, Xu-ehu.

1995. Paper presented at 2nd International Workshop on Plasma-Based Ion Implantation (PBII2), Sydney, New South Wales, Australia.

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review