Development of Nanotechnology for Biosensing, THz, and Meta Devices

Nanotechnology is applied to generate various nanostructures for high-performance biosensors, THz, and meta devices. Combining nanoimprint with precise dry etching, three-dimensional(3D) nanodevices with multiple layers and unique functions are produced with fast speed, highuniformity, and highly controllable dimensions. In this presentation, 3D plasmonic biosensorswill be shown to monitor cells and biomolecules with high sensitivity. Platforms with nanostructures are used to influence cell migration behaviors and separate cancer cells. Very high-frequency THz lenses and antennas with unique beam control will be shown using curved or metasurfaces. Moreover, multiple-layer metasurfaces with twist angles will be developed using nanoimprint to form chiral magic angles for light manipulation.