Development of CNT based sensor array on a MUMPs chip

King W. C. Lai; Ning Xi; Wen J. Li; C. P. Kwong

doi:10.1109/NANO.2006.247779

Development of CNT based sensor array on a MUMPs chip

King W. C. Lai, Ning Xi, Wen J. Li^*, C. P. Kwong

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE.

Original language	English
Title of host publication	2006 sixth IEEE Conference on Nanotechnology
Publisher	IEEE
Pages	798-801
Volume	2
ISBN (Electronic)	9781424400782
ISBN (Print)	1-4244-0077-5
DOIs	https://doi.org/10.1109/NANO.2006.247779
Publication status	Published - 2006
Externally published	Yes
Event	2006 6th IEEE Conference on Nanotechnology (IEEE-NANO 2006) - Cincinnati, OH, United States Duration: 17 Jun 2006 → 20 Jun 2006

Conference

Conference	2006 6th IEEE Conference on Nanotechnology (IEEE-NANO 2006)
Place	United States
City	Cincinnati, OH
Period	17/06/06 → 20/06/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

CNT sensors
DEP manipulation
Micro-robotic spotting
Nano batch fabrication
Nano manufacturing

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10.1109/NANO.2006.247779

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title = "Development of CNT based sensor array on a MUMPs chip",

abstract = "A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. {\textcopyright} 2006 IEEE.",

keywords = "CNT sensors, DEP manipulation, Micro-robotic spotting, Nano batch fabrication, Nano manufacturing",

author = "Lai, {King W. C.} and Ning Xi and Li, {Wen J.} and Kwong, {C. P.}",

year = "2006",

doi = "10.1109/NANO.2006.247779",

language = "English",

isbn = "1-4244-0077-5",

volume = "2",

pages = "798--801",

booktitle = "2006 sixth IEEE Conference on Nanotechnology",

publisher = "IEEE",

address = "United States",

note = "2006 6th IEEE Conference on Nanotechnology (IEEE-NANO 2006) ; Conference date: 17-06-2006 Through 20-06-2006",

}

TY - GEN

T1 - Development of CNT based sensor array on a MUMPs chip

AU - Lai, King W. C.

AU - Xi, Ning

AU - Li, Wen J.

AU - Kwong, C. P.

PY - 2006

Y1 - 2006

N2 - A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE.

AB - A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE.

KW - CNT sensors

KW - DEP manipulation

KW - Micro-robotic spotting

KW - Nano batch fabrication

KW - Nano manufacturing

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U2 - 10.1109/NANO.2006.247779

DO - 10.1109/NANO.2006.247779

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 1-4244-0077-5

VL - 2

SP - 798

EP - 801

BT - 2006 sixth IEEE Conference on Nanotechnology

PB - IEEE

T2 - 2006 6th IEEE Conference on Nanotechnology (IEEE-NANO 2006)

Y2 - 17 June 2006 through 20 June 2006

ER -

Development of CNT based sensor array on a MUMPs chip

Abstract

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UN SDGs

Research Keywords

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