Abstract
A novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based MEMS sensor is under development and described in this paper. The system will eventually combine a micro-robotic station for microinjection with AC electrophoretic manipulation of nano-wire bundles to produce nano-wire sensors with much more efficiency in cost and time than currently available fabrication methods. We have already proved that CNTs can be repeatably manipulated between micro-fabricated electrodes using dielectrophoretic manipulation, and demonstrated devices which can serve as novel thermal sensors with low power consumption (∼ μW) and fast frequency response (∼ 100kHz). Our current focus is the develop a feasible batch manufacturable method for functional CNT sensors using an automated microinjection system. The technique of dielectrophoretic manipulation and the design of the microinjection system are presented in this paper.
| Original language | English |
|---|---|
| Title of host publication | Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation |
| Pages | 588-593 |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | 2004 International Conference on Intelligent Mechatronics and Automation (ICIMA 2004) - University of Electronic Science and Technology of China (UESTC), Chengdu, China Duration: 26 Aug 2004 → 31 Aug 2004 |
Conference
| Conference | 2004 International Conference on Intelligent Mechatronics and Automation (ICIMA 2004) |
|---|---|
| Abbreviated title | ICIMA2004 |
| Place | China |
| City | Chengdu |
| Period | 26/08/04 → 31/08/04 |
Research Keywords
- AC electrophoretic manipulation
- Carbon nanotube
- CNT sensors
- Nano batch fabrication
- Nano manufacturing
