TY - GEN
T1 - Development of an automated microinjection system for fabrication of carbon nanotube sensors
AU - Qu, Selina C.
AU - Fung, Carmen K.M.
AU - Chan, Rosa H.M.
AU - Li, Wen J.
PY - 2004
Y1 - 2004
N2 - A novel automated Carbon Nanotube (CNT) microinjection system for batch fabricated a bulk multi-walled carbon nanotubes (MWNT) based MEMS sensor is presented. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. By utilizing AC electrophoretic technology, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. Besides, the devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼ μW) and fast frequency response (∼ 100 kHz). Based on these experimental evidences, a feasible batch manufacturable method for functional CNT sensors by using the automated injection system is developed which will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices.
AB - A novel automated Carbon Nanotube (CNT) microinjection system for batch fabricated a bulk multi-walled carbon nanotubes (MWNT) based MEMS sensor is presented. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. By utilizing AC electrophoretic technology, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. Besides, the devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼ μW) and fast frequency response (∼ 100 kHz). Based on these experimental evidences, a feasible batch manufacturable method for functional CNT sensors by using the automated injection system is developed which will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices.
UR - https://www.scopus.com/pages/publications/4444314241
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-4444314241&origin=recordpage
M3 - RGC 32 - Refereed conference paper (with host publication)
VL - 6
SP - 5613
EP - 5618
BT - Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
T2 - 5th World Congress on Intelligent Control and Automation, WCICA 2004
Y2 - 15 June 2004 through 19 June 2004
ER -