Design, simulation and fabrication of triaxial mems high shock accelerometer

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

3 Scopus Citations
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Author(s)

  • Zhenhai Zhang
  • Zhiguo Shi
  • Zhan Yang
  • Zhihong Xie
  • Donghong Zhang
  • De Cai
  • Kejie Li

Detail(s)

Original languageEnglish
Pages (from-to)2952-2957
Journal / PublicationJournal of Nanoscience and Nanotechnology
Volume15
Issue number4
Publication statusPublished - 1 Apr 2015

Abstract

On the basis of analyzing the disadvantage of other structural accelerometer, three-axis high g MEMS piezoresistive accelerometer was put forward in order to apply to the high-shock test field. The accelerometer's structure and working principle were discussed in details. The simulation results show that three-axis high shock MEMS accelerometer can bear high shock. After bearing high shock impact in high-shock shooting test, three-axis high shock MEMS accelerometer can obtain the intact metrical information of the penetration process and still guarantee the accurate precision of measurement in high shock load range, so we can not only analyze the law of stress wave spreading and the penetration rule of the penetration process of the body of the missile, but also furnish the testing technology of the burst point controlling. The accelerometer has far-ranging application in recording the typical data that projectile penetrating hard target and furnish both technology guarantees for penetration rule and defend engineering.

Research Area(s)

  • High g, MEMS Accelerometer, Piezoresistive, Sense element., Three-Axis

Citation Format(s)

Design, simulation and fabrication of triaxial mems high shock accelerometer. / Zhang, Zhenhai; Shi, Zhiguo; Yang, Zhan; Xie, Zhihong; Zhang, Donghong; Cai, De; Li, Kejie; Shen, Yajing.

In: Journal of Nanoscience and Nanotechnology, Vol. 15, No. 4, 01.04.2015, p. 2952-2957.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review