DESIGN OPTIMIZATION OF MEMS 2D SCANNING MIRRORS WITH HIGH RESONANT FREQUENCIES

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

6 Scopus Citations
View graph of relations

Author(s)

  • Wei Ma
  • Chun Cheong Wong
  • Yick Chuen Chan
  • Chen-Jung Tsai
  • Francis Chee Shuen Lee

Detail(s)

Original languageEnglish
Title of host publicationThe 23rd IEEE International Conference on Micro Electro Mechanical Systems MEMS 2010
Subtitle of host publicationTECHNICAL DIGEST
PublisherIEEE
Pages823-826
ISBN (Print)9781424457649
Publication statusPublished - Jan 2010
Externally publishedYes

Publication series

NameIEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
ISSN (Print)1084-6999

Conference

Title23rd IEEE International Conference on Micro-Electro-Mechanical Systems (MEMS 2010)
PlaceChina
CityHong Kong
Period24 - 28 January 2010

Abstract

An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model with +/-10% deviation. Based on the derived model, an optimized mirror design, with elliptical-shaped mirror and extended combs, was implemented and characterized. A 51.1% increase of the scanning angle has been measured using the optimized design.

Citation Format(s)

DESIGN OPTIMIZATION OF MEMS 2D SCANNING MIRRORS WITH HIGH RESONANT FREQUENCIES. / Ma, Wei; Chan, Ho-Yin; Wong, Chun Cheong; Chan, Yick Chuen; Tsai, Chen-Jung; Lee, Francis Chee Shuen.

The 23rd IEEE International Conference on Micro Electro Mechanical Systems MEMS 2010: TECHNICAL DIGEST. IEEE, 2010. p. 823-826 5442279 (IEEE International Conference on Micro Electro Mechanical Systems (MEMS) ).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review