Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators

Haoshen Zhu; Joshua E.-Y. Lee

doi:10.1016/j.proeng.2015.08.689

Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators

Haoshen Zhu
, Joshua E.-Y. Lee^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

28 Citations (Scopus)

100 Downloads (CityUHK Scholars)

Abstract

In this work, we experimentally demonstrate frequency-selective improvement of unloaded quality factor (Q_u) using one-dimensional (1D) phononic crystal (PnC) ring tethers in Aluminium Nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators. We show that the 1D-PnC tethers help boost Q_u by 3 times specifically at the desired resonant modes that lie in the PnC stopband but not for resonant modes lying outside the PnC stopband. These results show that the 1D-PnCs serve as frequency-selective acoustic reflectors.

Original language	English
Title of host publication	Procedia Engineering
Publisher	Elsevier
Pages	516-519
Volume	120
ISBN (Print)	1877-7058
DOIs	https://doi.org/10.1016/j.proeng.2015.08.689
Publication status	Published - Sept 2015
Event	29th European Conference on Solid-State Transducers, EUROSENSORS 2015 - Freiburg, Germany Duration: 6 Sept 2015 → 9 Sept 2015

Conference

Conference	29th European Conference on Solid-State Transducers, EUROSENSORS 2015
Place	Germany
City	Freiburg
Period	6/09/15 → 9/09/15

Research Keywords

Anchor loss
Micro-electro-mechanical systems (MEMS)
Phononic crystal
Quality factor
Resonator

Publisher's Copyright Statement

This full text is made available under CC-BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/

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@inproceedings{404dc434db1f49c48e52cb889d25b7a3,

title = "Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators",

abstract = "In this work, we experimentally demonstrate frequency-selective improvement of unloaded quality factor (Qu) using one-dimensional (1D) phononic crystal (PnC) ring tethers in Aluminium Nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators. We show that the 1D-PnC tethers help boost Qu by 3 times specifically at the desired resonant modes that lie in the PnC stopband but not for resonant modes lying outside the PnC stopband. These results show that the 1D-PnCs serve as frequency-selective acoustic reflectors.",

keywords = "Anchor loss, Micro-electro-mechanical systems (MEMS), Phononic crystal, Quality factor, Resonator",

author = "Haoshen Zhu and Lee, \{Joshua E.-Y.\}",

year = "2015",

month = sep,

doi = "10.1016/j.proeng.2015.08.689",

language = "English",

isbn = "1877-7058",

volume = "120",

pages = "516--519",

booktitle = "Procedia Engineering",

publisher = "Elsevier",

note = "29th European Conference on Solid-State Transducers, EUROSENSORS 2015 ; Conference date: 06-09-2015 Through 09-09-2015",

}

Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators. / Zhu, Haoshen; Lee, Joshua E.-Y.
Procedia Engineering. Vol. 120 Elsevier, 2015. p. 516-519.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators

AU - Zhu, Haoshen

AU - Lee, Joshua E.-Y.

PY - 2015/9

Y1 - 2015/9

N2 - In this work, we experimentally demonstrate frequency-selective improvement of unloaded quality factor (Qu) using one-dimensional (1D) phononic crystal (PnC) ring tethers in Aluminium Nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators. We show that the 1D-PnC tethers help boost Qu by 3 times specifically at the desired resonant modes that lie in the PnC stopband but not for resonant modes lying outside the PnC stopband. These results show that the 1D-PnCs serve as frequency-selective acoustic reflectors.

AB - In this work, we experimentally demonstrate frequency-selective improvement of unloaded quality factor (Qu) using one-dimensional (1D) phononic crystal (PnC) ring tethers in Aluminium Nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators. We show that the 1D-PnC tethers help boost Qu by 3 times specifically at the desired resonant modes that lie in the PnC stopband but not for resonant modes lying outside the PnC stopband. These results show that the 1D-PnCs serve as frequency-selective acoustic reflectors.

KW - Anchor loss

KW - Micro-electro-mechanical systems (MEMS)

KW - Phononic crystal

KW - Quality factor

KW - Resonator

UR - https://www.scopus.com/pages/publications/84985034300

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84985034300&origin=recordpage

U2 - 10.1016/j.proeng.2015.08.689

DO - 10.1016/j.proeng.2015.08.689

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 1877-7058

VL - 120

SP - 516

EP - 519

BT - Procedia Engineering

PB - Elsevier

T2 - 29th European Conference on Solid-State Transducers, EUROSENSORS 2015

Y2 - 6 September 2015 through 9 September 2015

ER -

Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators

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Research Keywords

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