Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays

G. M H Chan; Jie Wang; W. J. Li; Chung-Ping Kwong; Kwai-Man Luk; Ke-Li Wu

doi:10.1109/RISSP.2003.1285669

Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays

G. M H Chan
, Jie Wang
, W. J. Li
, Chung-Ping Kwong
, Kwai-Man Luk
, Ke-Li Wu

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

This paper presents the modeling and analysis of a MEMS switch for microwave applications. Parylene polymer (poly-para-xylylene) is studied as a substitution for silicon or metal-based materials in existing capacitive shunt RF switches to enhance the device performance. Through modeling and analysis, we have shown that polymer-based RF switches can be driven by lower actuation voltage with larger off/on capacitance ratio. Fabrication of the switch and integration of the switch with wireless antenna system is underway. Successful development of the switch will potentially enhance the performance of adaptive fractal antennas for microwave applications.

Original language	English
Title of host publication	Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003
Publisher	IEEE
Pages	698-703
Volume	2
ISBN (Print)	0-7803-7925-X
DOIs	https://doi.org/10.1109/RISSP.2003.1285669
Publication status	Published - 2003
Event	IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003 - Changsha, China Duration: 8 Oct 2003 → 13 Oct 2003

Publication series

Name
Volume	2

Conference

Conference	IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003
Place	China
City	Changsha
Period	8/10/03 → 13/10/03

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10.1109/RISSP.2003.1285669

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Chan, G. M. H., Wang, J., Li, W. J., Kwong, C.-P., Luk, K.-M., & Wu, K.-L. (2003). Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays. In Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003 (Vol. 2, pp. 698-703). Article 1285669 IEEE. https://doi.org/10.1109/RISSP.2003.1285669

@inproceedings{d1c03c20ec9d4fd99f8de9a7dbc56f82,

title = "Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays",

abstract = "This paper presents the modeling and analysis of a MEMS switch for microwave applications. Parylene polymer (poly-para-xylylene) is studied as a substitution for silicon or metal-based materials in existing capacitive shunt RF switches to enhance the device performance. Through modeling and analysis, we have shown that polymer-based RF switches can be driven by lower actuation voltage with larger off/on capacitance ratio. Fabrication of the switch and integration of the switch with wireless antenna system is underway. Successful development of the switch will potentially enhance the performance of adaptive fractal antennas for microwave applications.",

author = "Chan, \{G. M H\} and Jie Wang and Li, \{W. J.\} and Chung-Ping Kwong and Kwai-Man Luk and Ke-Li Wu",

year = "2003",

doi = "10.1109/RISSP.2003.1285669",

language = "English",

isbn = "0-7803-7925-X",

volume = "2",

publisher = "IEEE",

pages = "698--703",

booktitle = "Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003",

address = "United States",

note = "IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003 ; Conference date: 08-10-2003 Through 13-10-2003",

}

Chan, GMH, Wang, J, Li, WJ, Kwong, C-P, Luk, K-M & Wu, K-L 2003, Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays. in Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003. vol. 2, 1285669, IEEE, pp. 698-703, IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003, Changsha, China, 8/10/03. https://doi.org/10.1109/RISSP.2003.1285669

Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays. / Chan, G. M H; Wang, Jie; Li, W. J. et al.
Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003. Vol. 2 IEEE, 2003. p. 698-703 1285669.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays

AU - Chan, G. M H

AU - Wang, Jie

AU - Li, W. J.

AU - Kwong, Chung-Ping

AU - Luk, Kwai-Man

AU - Wu, Ke-Li

PY - 2003

Y1 - 2003

N2 - This paper presents the modeling and analysis of a MEMS switch for microwave applications. Parylene polymer (poly-para-xylylene) is studied as a substitution for silicon or metal-based materials in existing capacitive shunt RF switches to enhance the device performance. Through modeling and analysis, we have shown that polymer-based RF switches can be driven by lower actuation voltage with larger off/on capacitance ratio. Fabrication of the switch and integration of the switch with wireless antenna system is underway. Successful development of the switch will potentially enhance the performance of adaptive fractal antennas for microwave applications.

AB - This paper presents the modeling and analysis of a MEMS switch for microwave applications. Parylene polymer (poly-para-xylylene) is studied as a substitution for silicon or metal-based materials in existing capacitive shunt RF switches to enhance the device performance. Through modeling and analysis, we have shown that polymer-based RF switches can be driven by lower actuation voltage with larger off/on capacitance ratio. Fabrication of the switch and integration of the switch with wireless antenna system is underway. Successful development of the switch will potentially enhance the performance of adaptive fractal antennas for microwave applications.

UR - https://www.scopus.com/pages/publications/84990990499

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84990990499&origin=recordpage

U2 - 10.1109/RISSP.2003.1285669

DO - 10.1109/RISSP.2003.1285669

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-7925-X

VL - 2

SP - 698

EP - 703

BT - Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003

PB - IEEE

T2 - IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003

Y2 - 8 October 2003 through 13 October 2003

ER -

Chan GMH, Wang J, Li WJ, Kwong CP, Luk KM, Wu KL. Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays. In Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003. Vol. 2. IEEE. 2003. p. 698-703. 1285669 doi: 10.1109/RISSP.2003.1285669

Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays

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