Design and Upgrade of PLC Based High Voltage Pulser for Plasma Immersion Ion Implantation

Zongtao Zhu; Chunzhi Gong; Xiubo Tian; Shiqin Yang; Ricky K. Y. Fu; Paul K. Chu

Design and Upgrade of PLC Based High Voltage Pulser for Plasma Immersion Ion Implantation

Zongtao Zhu^*
, Chunzhi Gong
, Xiubo Tian
, Shiqin Yang
, Ricky K. Y. Fu
, Paul K. Chu

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	Proceedings 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB)
Pages	51
Publication status	Published - 13 Sept 2011
Event	17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2011) - Harbin, China Duration: 13 Sept 2011 → 17 Sept 2011

Conference

Conference	17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2011)
Place	China
City	Harbin
Period	13/09/11 → 17/09/11

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Cite this

@inproceedings{20ad324ed67d48108d43411d1a54e149,

title = "Design and Upgrade of PLC Based High Voltage Pulser for Plasma Immersion Ion Implantation",

author = "Zongtao Zhu and Chunzhi Gong and Xiubo Tian and Shiqin Yang and Fu, \{Ricky K. Y.\} and Chu, \{Paul K.\}",

year = "2011",

month = sep,

day = "13",

language = "English",

pages = "51",

booktitle = "Proceedings 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB)",

note = "17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2011) ; Conference date: 13-09-2011 Through 17-09-2011",

}

Zhu, Z, Gong, C, Tian, X, Yang, S, Fu, RKY & Chu, PK 2011, Design and Upgrade of PLC Based High Voltage Pulser for Plasma Immersion Ion Implantation. in Proceedings 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB). pp. 51, 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2011), Harbin, China, 13/09/11.

Design and Upgrade of PLC Based High Voltage Pulser for Plasma Immersion Ion Implantation. / Zhu, Zongtao; Gong, Chunzhi; Tian, Xiubo et al.
Proceedings 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB). 2011. p. 51.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Design and Upgrade of PLC Based High Voltage Pulser for Plasma Immersion Ion Implantation

AU - Zhu, Zongtao

AU - Gong, Chunzhi

AU - Tian, Xiubo

AU - Yang, Shiqin

AU - Fu, Ricky K. Y.

AU - Chu, Paul K.

PY - 2011/9/13

Y1 - 2011/9/13

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 51

BT - Proceedings 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB)

T2 - 17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2011)

Y2 - 13 September 2011 through 17 September 2011

ER -