Design and simulation of an angular-rate vibrating microgyroscope

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

37 Scopus Citations
Scopus Metrics
View graph of relations

Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)241-256
Journal / PublicationSensors and Actuators, A: Physical
Volume116
Issue number2
Publication statusPublished - 15 Oct 2004
Externally publishedYes

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-4544230402&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(58abb824-f847-4a86-ac33-9c4a9f7ed25c).html

Abstract

Microgyroscopes have several potential applications in the aerospace, automotive, defense and bio-medical engineering. The present work provides a detailed account of the design and simulation for a typical high-resolution comb-driven capacitively-sensed microgyroscope fabricated from SOI 40μm thick wafer. The results show that high sensitivity and resolution are possible by the use of a thicker device layer along with a larger sensing area. A thicker device layer not only increases sensitivity and resolution but also ensures higher pull-in voltages and lower pollution of sensing mode. Comparison of lumped mass/stiffness modeling versus finite element modeling, nonlinearity in the output response, electrostatic pull-in characteristics, and scaling characteristics of natural frequencies and pull-in voltages are some aspects that are discussed in detail. © 2004 Elsevier B.V. All rights reserved.

Research Area(s)

  • Angular-rate sensor, MEMS, Microgyroscope, Micromachined gyroscope, Rate-gyroscope, Rotational-rate sensor

Fingerprint

Publication fingerprints text

100
High Resolution Engineering
100
Pull-in Voltage Engineering
50
Engineering Engineering
50
Potential Applicati... Engineering
50
Output Response Engineering
50
Lumped Mass Engineering
50
Automotives Engineering
50
Fem Model Engineering
50
Resonant Frequency Engineering
50
Nonlinearity Engineering
Full Fingerprint ›

Citation Format(s)

[ RIS ] [ BibTeX ]
Design and simulation of an angular-rate vibrating microgyroscope. / Rajendran, S.; Liew, K. M.
In: Sensors and Actuators, A: Physical, Vol. 116, No. 2, 15.10.2004, p. 241-256.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review