Design and Manufacturing of CNT-Based Nanodevices for Optical Sensing Applications

Carbon nanotube (CNT) has some unique properties that are superior to some conventional semiconducting materials. We have developed a spectrum infrared (IR) sensor using a CNT which is capable to sense IR from near IR (NIR) middle-wave IR (MWIR) radiation in room temperature environment. This chapter gives an idea to design and fabricate CNT-based IR sensors. In addition, we have developed a series of processes to manufacture the devices. The process starts with the microfluidic-based delivery and separation of the nanomaterials. A precision assembly can be achieved by the atomic force microscopy-based nanorobotic system. It is capable of manipulating the nanomaterial at the desired position efficiently. The band gap of the semiconducting material is an important property for many applications, such as optical detectors and solar cells. We have developed an electrical breakdown control method to adjust the band structure of a CNT; this process has provided a steady and high-yield on-chip band gap engineering approach in batch electronics fabrication. Therefore, the spectral response of the devices can be adjusted. Finally, thermal annealing process and packaging process have been developed to maintain stability and reliability of nanodevices. The integration of the above technologies has provided an effective and efficient nanomanufacturing process for fabrication of nanosensors and electronic devices.