Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

  • Yick Chuen Chan
  • Chun Cheong Wong
  • Congshun Wang
  • Wei Ma
  • Shoulung Chen
  • Hon Lung Cheung
  • Francis Chee Shuen Lee
  • Chen-Jung Tsai

Detail(s)

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010)
PublisherIEEE
Pages186-190
ISBN (Electronic)9781424465453
ISBN (Print)9781424465439
Publication statusPublished - Jan 2010
Externally publishedYes

Publication series

NameIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherIEEE

Conference

Title5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
PlaceChina
CityXiamen
Period20 - 23 January 2010

Abstract

The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.

Citation Format(s)

Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset. / Chan, Yick Chuen; Wong, Chun Cheong; Wang, Congshun; Ma, Wei; Chan, Ho-Yin; Chen, Shoulung; Cheung, Hon Lung; Lee, Francis Chee Shuen; Tsai, Chen-Jung.

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010). IEEE, 2010. p. 186-190 5592180 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review