Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset

Yick Chuen Chan; Chun Cheong Wong; Congshun Wang; Wei Ma; Ho-Yin Chan; Shoulung Chen; Hon Lung Cheung; Francis Chee Shuen Lee; Chen-Jung Tsai

doi:10.1109/NEMS.2010.5592180

Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset

Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, Francis Chee Shuen Lee, Chen-Jung Tsai^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

5 Citations (Scopus)

Abstract

The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.

Original language	English
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010)
Publisher	IEEE
Pages	186-190
ISBN (Electronic)	9781424465453
ISBN (Print)	9781424465439
DOIs	https://doi.org/10.1109/NEMS.2010.5592180
Publication status	Published - Jan 2010
Externally published	Yes
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: 20 Jan 2010 → 23 Jan 2010

Publication series

Name	IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Publisher	IEEE

Conference

Conference	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	20/01/10 → 23/01/10

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10.1109/NEMS.2010.5592180

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Chan, Y. C., Wong, C. C., Wang, C., Ma, W., Chan, H.-Y., Chen, S., Cheung, H. L., Lee, F. C. S., & Tsai, C.-J. (2010). Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) (pp. 186-190). Article 5592180 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)). IEEE. https://doi.org/10.1109/NEMS.2010.5592180

@inproceedings{323bc3efc0204fe4bce1122543220e37,

title = "Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset",

abstract = "The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.",

author = "Chan, {Yick Chuen} and Wong, {Chun Cheong} and Congshun Wang and Wei Ma and Ho-Yin Chan and Shoulung Chen and Cheung, {Hon Lung} and Lee, {Francis Chee Shuen} and Chen-Jung Tsai",

year = "2010",

month = jan,

doi = "10.1109/NEMS.2010.5592180",

language = "English",

isbn = "9781424465439",

series = "IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)",

publisher = "IEEE",

pages = "186--190",

booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010)",

address = "United States",

note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",

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Chan, YC, Wong, CC, Wang, C, Ma, W, Chan, H-Y, Chen, S, Cheung, HL, Lee, FCS & Tsai, C-J 2010, Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010)., 5592180, IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), IEEE, pp. 186-190, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 20/01/10. https://doi.org/10.1109/NEMS.2010.5592180

Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset. / Chan, Yick Chuen; Wong, Chun Cheong; Wang, Congshun et al.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010). IEEE, 2010. p. 186-190 5592180 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset

AU - Chan, Yick Chuen

AU - Wong, Chun Cheong

AU - Wang, Congshun

AU - Ma, Wei

AU - Chan, Ho-Yin

AU - Chen, Shoulung

AU - Cheung, Hon Lung

AU - Lee, Francis Chee Shuen

AU - Tsai, Chen-Jung

PY - 2010/1

Y1 - 2010/1

N2 - The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.

AB - The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.

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DO - 10.1109/NEMS.2010.5592180

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781424465439

T3 - IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

SP - 186

EP - 190

BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010)

PB - IEEE

T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

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ER -

Chan YC, Wong CC, Wang C, Ma W, Chan HY, Chen S et al. Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010). IEEE. 2010. p. 186-190. 5592180. (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)). doi: 10.1109/NEMS.2010.5592180

Design and Fabrication of a MEMS Scanning Mirror with and without Comb Offset

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