Deposition of ultra-thin diamond-like carbon protective coating on magnetic disks by electron cyclotron resonance plasma technique
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Pages (from-to) | 167-173 |
Journal / Publication | Journal of Non-Crystalline Solids |
Volume | 254 |
Issue number | 1-3 |
Publication status | Published - Sept 1999 |
Conference
Title | Proceedings of the 1998 2nd International Conference on Amorphous and Crystalline Insulating Thin Films II |
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City | Hong Kong, China |
Period | 12 - 14 October 1998 |
Link(s)
Abstract
Diamond-like carbon (DLC) films were prepared on Si and magnetic disks using an electron cyclotron resonance assisted microwave plasma chemical vapour deposition system with variable radio-frequency (rf) substrate bias. Surface morphology of disks deposited with 10 nm DLC was observed under atomic force microscopy (AFM), which revealed surfaces smoother than the uncoated disk. The root-mean-square roughness decreased with increasing substrate bias and reduced to 0.23 nm for film prepared at a bias of -150 V. Internal stress and hardness of the resulting films deposited on Si were investigated by curvature measurement and nano-indentation, respectively. Both internal stress and hardness increased with increasing ion energies. At a bias beyond -120 V, the film structure changed from diamond-like to graphite-like. There was also an improvement of scratch resistance of the DLC coatings deposited at bias >-90 V.
Citation Format(s)
Deposition of ultra-thin diamond-like carbon protective coating on magnetic disks by electron cyclotron resonance plasma technique. / Fung, M. K.; Chan, W. C.; Lai, K. H. et al.
In: Journal of Non-Crystalline Solids, Vol. 254, No. 1-3, 09.1999, p. 167-173.
In: Journal of Non-Crystalline Solids, Vol. 254, No. 1-3, 09.1999, p. 167-173.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review