Deposition of ultra-thin diamond-like carbon protective coating on magnetic disks by electron cyclotron resonance plasma technique

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

  • M. K. Fung
  • W. C. Chan
  • K. H. Lai
  • I. Bello
  • N. B. Wong
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)167-173
Journal / PublicationJournal of Non-Crystalline Solids
Volume254
Issue number1-3
Publication statusPublished - Sept 1999

Conference

TitleProceedings of the 1998 2nd International Conference on Amorphous and Crystalline Insulating Thin Films II
CityHong Kong, China
Period12 - 14 October 1998

Abstract

Diamond-like carbon (DLC) films were prepared on Si and magnetic disks using an electron cyclotron resonance assisted microwave plasma chemical vapour deposition system with variable radio-frequency (rf) substrate bias. Surface morphology of disks deposited with 10 nm DLC was observed under atomic force microscopy (AFM), which revealed surfaces smoother than the uncoated disk. The root-mean-square roughness decreased with increasing substrate bias and reduced to 0.23 nm for film prepared at a bias of -150 V. Internal stress and hardness of the resulting films deposited on Si were investigated by curvature measurement and nano-indentation, respectively. Both internal stress and hardness increased with increasing ion energies. At a bias beyond -120 V, the film structure changed from diamond-like to graphite-like. There was also an improvement of scratch resistance of the DLC coatings deposited at bias >-90 V.

Citation Format(s)

Deposition of ultra-thin diamond-like carbon protective coating on magnetic disks by electron cyclotron resonance plasma technique. / Fung, M. K.; Chan, W. C.; Lai, K. H. et al.
In: Journal of Non-Crystalline Solids, Vol. 254, No. 1-3, 09.1999, p. 167-173.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review