Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation

Nan Huang; Yongxiang  Leng; Jin Wang; Hong Sun; Jungying Cheng; Ping Yang; GuoJiang Wan; Paul K. Chu

Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation

Nan Huang
, Yongxiang Leng
, Jin Wang
, Hong Sun
, Jungying Cheng
, Ping Yang
, GuoJiang Wan
, Paul K. Chu

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials
Subtitle of host publication	BOOK OF ABSTRACTS
Publication status	Published - Sept 2000
Event	5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials - Dalian, China Duration: 10 Sept 2000 → 13 Sept 2000

Conference

Conference	5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials
Place	China
City	Dalian
Period	10/09/00 → 13/09/00

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Cite this

@inproceedings{641e8f2fece7488c8248cda03fff8bf6,

title = "Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation",

author = "Nan Huang and Yongxiang Leng and Jin Wang and Hong Sun and Jungying Cheng and Ping Yang and GuoJiang Wan and Chu, \{Paul K.\}",

year = "2000",

month = sep,

language = "English",

booktitle = "5th Asia-Pacific Conference on Plasma Science \& Technology and 13th Symposium on Plasma Science for Materials",

note = "5th Asia-Pacific Conference on Plasma Science \& Technology and 13th Symposium on Plasma Science for Materials ; Conference date: 10-09-2000 Through 13-09-2000",

}

Huang, N, Leng, Y, Wang, J, Sun, H, Cheng, J, Yang, P, Wan, G & Chu, PK 2000, Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation. in 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS. 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials, Dalian, China, 10/09/00.

Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation. / Huang, Nan; Leng, Yongxiang; Wang, Jin et al.
5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS. 2000.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation

AU - Huang, Nan

AU - Leng, Yongxiang

AU - Wang, Jin

AU - Sun, Hong

AU - Cheng, Jungying

AU - Yang, Ping

AU - Wan, GuoJiang

AU - Chu, Paul K.

PY - 2000/9

Y1 - 2000/9

M3 - RGC 32 - Refereed conference paper (with host publication)

BT - 5th Asia-Pacific Conference on Plasma Science & Technology and 13th Symposium on Plasma Science for Materials

T2 - 5th Asia-Pacific Conference on Plasma Science & Technology and 13th Symposium on Plasma Science for Materials

Y2 - 10 September 2000 through 13 September 2000

ER -