Dependence of temperature coefficient of frequency (TCf) on crystallography and eigenmode in N-doped silicon contour mode micromechanical resonators

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

Silicon Material Science

Resonator Material Science

Crystallography Material Science

Crystal Orientation Material Science

Single Crystal Material Science

Elasticity Material Science

Engineering

Resonator Engineering

Eigenmode Engineering

Temperature Coeffic... Engineering

Silicon Single Crys... Engineering

Square Plate Engineering

Doping Level Engineering

Elastic Constant Engineering

Crystal Orientation Engineering

Research OutputsResearch Output authored by Dependence of temperature coefficient of frequency (TCf) on crystallography and eigenmode in N-doped silicon contour mode micromechanical resonators is tagged with the concept

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