Dependence of Electrical Properties on Thermal Temperature in Nanocrystalling SnO2 Thin Films

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

  • J. Du
  • H. J. Zhang
  • Z. Jiao
  • M. H. Wu
  • Z. W. Chen

Detail(s)

Original languageEnglish
Title of host publicationINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
EditorsPaul K. Chu
PublisherIEEE
Pages670-671
ISBN (Print)9781424435449
Publication statusPublished - Jan 2010

Conference

Title3rd IEEE International NanoElectronics Conference (INEC 2010)
LocationCity University of Hong Kong
PlaceChina
CityHong Kong
Period3 - 8 January 2010

Abstract

Nanocrystalline SnO2 thin films were prepared by pulsed laser deposition techniques on clean glass substrates, and the films were then annealed for 30 min from 50 to 550 °C with a step of 50 °C, respectively. The investigation of X-ray diffraction confirmed that the various SnO2 thin films were consisted of nanoparticles with average grain size in the range of 23.7-28.9 nm. Root-mean-square surface roughness of the as-prepared SnO2 thin film was measured to be 25.6 nm which decreases to 16.2 nm with thermal annealing. Electrical resistivity and refractive index were measured as a function of annealing temperature, and found to lie between 1.24 to 1.45 mΩ-cm, and 1.502 to 1.349, respectively. The results indicate that nearly opposite actions to root-mean-square surface roughness and electrical resistivity make a unique performance with thermal annealing temperature. The post annealing shows greater tendency to affect the structural and electrical properties of SnO2 thin films which composed of nanoparticles.

Citation Format(s)

Dependence of Electrical Properties on Thermal Temperature in Nanocrystalling SnO2 Thin Films. / Du, J.; Zhang, H. J.; Jiao, Z.; Wu, M. H.; Shek, C. H.; Wu, C. M. L.; Lai, J. K. L.; Chen, Z. W.

INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. ed. / Paul K. Chu. IEEE, 2010. p. 670-671 5424650.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review