Dependence of Corrosion-Resistance of Ti(NO)x Films on Bias Voltage Produced by Dynamic PIII-IBED

Dependence of Corrosion-Resistance of Ti(NO)_x Films on Bias Voltage Produced by Dynamic PIII-IBED

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	VI^th International Workshop on Plasma-Based Ion Implantation - Abstract
Publication status	Published - Jun 2001
Event	VI^th International Workshop on Plasma-Based Ion Implantation - Grenoble, France Duration: 26 Jun 2001 → 28 Jun 2001 http://www.polycnrs-gre.fr/

Conference	VI^th International Workshop on Plasma-Based Ion Implantation
Place	France
City	Grenoble
Period	26/06/01 → 28/06/01
Internet address	http://www.polycnrs-gre.fr/

@inproceedings{60e3d27016614bcc8a8937545c1bed9e,

title = "Dependence of Corrosion-Resistance of Ti(NO)x Films on Bias Voltage Produced by Dynamic PIII-IBED",

author = "Xiubo Tian and Fu, \{Ricky K.Y.\} and Chu, \{Paul K.\}",

year = "2001",

month = jun,

language = "English",

booktitle = "VIth International Workshop on Plasma-Based Ion Implantation - Abstract",

note = "VI<sup>th</sup> International Workshop on Plasma-Based Ion Implantation ; Conference date: 26-06-2001 Through 28-06-2001",

url = "http://www.polycnrs-gre.fr/",

}

Dependence of Corrosion-Resistance of Ti(NO)_x Films on Bias Voltage Produced by Dynamic PIII-IBED. / Tian, Xiubo; Fu, Ricky K.Y.; Chu, Paul K.
VI^th International Workshop on Plasma-Based Ion Implantation - Abstract. 2001.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Dependence of Corrosion-Resistance of Ti(NO)x Films on Bias Voltage Produced by Dynamic PIII-IBED

AU - Tian, Xiubo

AU - Fu, Ricky K.Y.

AU - Chu, Paul K.

PY - 2001/6

Y1 - 2001/6

M3 - RGC 32 - Refereed conference paper (with host publication)

BT - VIth International Workshop on Plasma-Based Ion Implantation - Abstract

T2 - VI<sup>th</sup> International Workshop on Plasma-Based Ion Implantation

Y2 - 26 June 2001 through 28 June 2001

ER -