Demonstrating applications of non-optically regulated tapping-mode near-field scanning optical microscopy to nano-optical metrology and optical characterization of semiconductors

Nien Hua Lu, Shuen De Chang, Guan-Bin Huang, Hung Ji Huang, Ying Sheng Huang, Hai-Pang Chiang, Din Ping Tsai

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

2 Citations (Scopus)

Abstract

We demonstrate the applications of a near-field scanning optical microscopy (NSOM) system based on a short-probe tappingmode tuning fork (TMTF) configuration to nano-optical metrology and the optical characterization of semiconductors. The short-probe TMTF-NSOM system is constructed to operate in both collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as a light collector/emitter as well as a force-sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged in the collection mode. Excitation-mode short-probe TMTF-NSOM is applied to near-field surface photovoltage measurement on distributed-Braggreflector-enhanced absorbing substrate AlGaInP light-emitting diode structures. © 2006 The Japan Society of Applied Physics.
Original languageEnglish
Pages (from-to)2187-2192
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number3 B
DOIs
Publication statusPublished - 27 Mar 2006
Externally publishedYes

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

Research Keywords

  • Evanescent field
  • Interference
  • Nano-optical metrology
  • Near-field scanning optical microscopy
  • Short probe
  • Surface photovoltage
  • Tapping mode
  • Total internal reflection
  • Tuning fork

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