Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition

N. Huang; G. J. Wan; Y. X. Leng; H. Sun; P. Yang; J. Y. Chen; J.   Wang; Y. Leng; Paul Kim Ho CHU

Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition

N. Huang, G. J. Wan, Y. X. Leng, H. Sun, P. Yang, J. Y. Chen, J. Wang, Y. Leng, Paul Kim Ho CHU

Department of Physics

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	VI^th International Workshop on Plasma-Based Ion Implantation - Abstract
Publication status	Published - Jun 2001
Event	VI^th International Workshop on Plasma-Based Ion Implantation - Grenoble, France Duration: 26 Jun 2001 → 28 Jun 2001 http://www.polycnrs-gre.fr/

Conference

Conference	VI^th International Workshop on Plasma-Based Ion Implantation
Country/Territory	France
City	Grenoble
Period	26/06/01 → 28/06/01
Internet address	http://www.polycnrs-gre.fr/

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@inproceedings{e6cb2ff8c2034dc6b4a9e01c735b9b0d,

title = "Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition",

author = "N. Huang and Wan, {G. J.} and Leng, {Y. X.} and H. Sun and P. Yang and Chen, {J. Y.} and J. Wang and Y. Leng and CHU, {Paul Kim Ho}",

year = "2001",

month = jun,

language = "English",

booktitle = "VIth International Workshop on Plasma-Based Ion Implantation - Abstract",

note = "VI<sup>th</sup> International Workshop on Plasma-Based Ion Implantation ; Conference date: 26-06-2001 Through 28-06-2001",

url = "http://www.polycnrs-gre.fr/",

}

Huang, N, Wan, GJ, Leng, YX, Sun, H, Yang, P, Chen, JY, Wang, J, Leng, Y & CHU, PKH 2001, Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition. in VI^th International Workshop on Plasma-Based Ion Implantation - Abstract. VI^th International Workshop on Plasma-Based Ion Implantation, Grenoble, France, 26/06/01.

Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition. / Huang, N.; Wan, G. J.; Leng, Y. X. et al.
VI^th International Workshop on Plasma-Based Ion Implantation - Abstract. 2001.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition

AU - Huang, N.

AU - Wan, G. J.

AU - Leng, Y. X.

AU - Sun, H.

AU - Yang, P.

AU - Chen, J. Y.

AU - Wang, J.

AU - Leng, Y.

AU - CHU, Paul Kim Ho

PY - 2001/6

Y1 - 2001/6

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2001/01.C29.pdf

M3 - RGC 32 - Refereed conference paper (with host publication)

BT - VIth International Workshop on Plasma-Based Ion Implantation - Abstract

T2 - VI<sup>th</sup> International Workshop on Plasma-Based Ion Implantation

Y2 - 26 June 2001 through 28 June 2001

ER -

Deformation Behavior of Titanium Nitride and Titanium Oxide / Titanium Nitride Films Prepared by Plasma Immersion Ion Implantation and Deposition

Conference

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