Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

H. Zhu; G. C. Shan; C. Tu; J. E Y Lee

doi:10.1109/MEMSYS.2013.6474354

Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

H. Zhu^*
, G. C. Shan
, C. Tu
, J. E Y Lee

^*Corresponding author for this work

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

6 Citations (Scopus)

Abstract

This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the direction, while much greater variation in the TCf was observed among the devices aligned against the direction. For the SE mode, the devices in both and orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown. © 2013 IEEE.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	761-764
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474354
Publication status	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, China Duration: 20 Jan 2013 → 24 Jan 2013

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Name
ISSN (Print)	1084-6999

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Place	Taiwan, China
City	Taipei
Period	20/01/13 → 24/01/13

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@inproceedings{2506622e8c7a4616b8e90da4b1f1bac4,

title = "Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators",

abstract = "This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lam{\'e} mode and square extensional (SE). For the Lam{\'e} mode, the same TCf was found over several devices aligned to the direction, while much greater variation in the TCf was observed among the devices aligned against the direction. For the SE mode, the devices in both and orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown. {\textcopyright} 2013 IEEE.",

author = "H. Zhu and Shan, \{G. C.\} and C. Tu and Lee, \{J. E Y\}",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474354",

language = "English",

isbn = "9781467356558",

pages = "761--764",

booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Zhu, H, Shan, GC, Tu, C & Lee, JEY 2013, Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 6474354, pp. 761-764, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, China, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474354

Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators. / Zhu, H.; Shan, G. C.; Tu, C. et al.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2013. p. 761-764 6474354.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

AU - Zhu, H.

AU - Shan, G. C.

AU - Tu, C.

AU - Lee, J. E Y

PY - 2013

Y1 - 2013

N2 - This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the direction, while much greater variation in the TCf was observed among the devices aligned against the direction. For the SE mode, the devices in both and orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown. © 2013 IEEE.

AB - This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the direction, while much greater variation in the TCf was observed among the devices aligned against the direction. For the SE mode, the devices in both and orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown. © 2013 IEEE.

UR - https://www.scopus.com/pages/publications/84875473560

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84875473560&origin=recordpage

U2 - 10.1109/MEMSYS.2013.6474354

DO - 10.1109/MEMSYS.2013.6474354

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781467356558

SP - 761

EP - 764

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -

Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

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