Crystal orientation and hardness of Au/NiCr/Ta films on Si-(111) substrate prepared by magnetron sputtering
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | Multi-Functional Materials and Structures II |
| Pages | 719-722 |
| Volume | 79-82 |
| Publication status | Published - 2009 |
| Externally published | Yes |
Publication series
| Name | Advanced Materials Research |
|---|---|
| Volume | 79-82 |
| ISSN (Print) | 1022-6680 |
Conference
| Title | 2nd International Conference on Multi-Functional Materials and Structures, MFMS-2009 |
|---|---|
| Place | China |
| City | Qingdao |
| Period | 9 - 12 October 2009 |
Link(s)
Abstract
Au/NiCr/Ta soft multi-layered metal films were deposited on hard Si-(111) substrate by magnetron sputtering. The crystal orientation, Hardness (H) and Elastic modulus (E) were investigated as a function of substrate temperature by XRD and nanoindentation techniques. The XRD revealed that all films on Si-(111) substrate are Au-(111) preferred orientation, indicating there are no alloying phases in the films, which is different from Au/NiCr/Ta films on Al 2O3 substrate with a mixture of Au-(111) and Au-(200) orientation. Nanoindentation tests at shallow indentation depths (h≤t/4) where the hardness is reliable for metal films on hard substrate. Au film at substrate temperature 200°C has the highest hardness 4.2GPa. Meanwhile, the H/E value also indicated that the Au/NiCr/Ta films have preferable wear resistance at substrate temperature 200°C.
Research Area(s)
- Crystal orientation, Hardness, Metal film, Nanoindentation
Citation Format(s)
Crystal orientation and hardness of Au/NiCr/Ta films on Si-(111) substrate prepared by magnetron sputtering. / Tang, Wu; Yin, Xuesong; Deng, Longjiang et al.
Multi-Functional Materials and Structures II. Vol. 79-82 2009. p. 719-722 (Advanced Materials Research; Vol. 79-82).Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
