Co/Si/Ti/Si(100) 多层薄膜固相反应异质外延生长 CoSi薄膜

Heteroepitaxial growth of CoSi2 on Si(100) substrate by Co/Si/Ti/Si multilayer solid phase reaction

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review