Abstract
This paper aims at advancing micromanipulation technology with in-situ PVDF piezoelectric force sensing and control during microassembly and packaging process. To allow close monitoring of magnitude and direction of forces (surface, friction, and assembly force) acting on micro devices during manipulation, the polyvinylidene fluoride (PVDF) is used to fabricate highly sensitive 1-D and 2-D force sensors for assembly of micro devices. By using the designed force sensors with the effective signal processing techniques, the contact force/impact signal can be obtained desirably so that it greatly improves the reliability of force regulation in microassembly. Moreover, based on a new sensor-referenced control method, the force control had been implemented by employing a micromanipulator system equipped with the force sensor and its results verify the effectiveness of sensor model as well as the performance of force feedback and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE International Symposium on Assembly and Task Planning |
| Publisher | IEEE Computer Society |
| Pages | 60-65 |
| Volume | 2003-January |
| ISBN (Print) | 780377702 |
| DOIs | |
| Publication status | Published - 2003 |
| Externally published | Yes |
| Event | 5th IEEE International Symposium on Assembly and Task Planning, ISATP 2003 - Besancon, France Duration: 10 Jul 2003 → 11 Jul 2003 https://ieeexplore.ieee.org/xpl/conhome/8634/proceeding |
Publication series
| Name | |
|---|---|
| Volume | 2003-January |
Conference
| Conference | 5th IEEE International Symposium on Assembly and Task Planning, ISATP 2003 |
|---|---|
| Place | France |
| City | Besancon |
| Period | 10/07/03 → 11/07/03 |
| Internet address |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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