Conformal phase masks made of polyurethane acrylate with optimized elastic modulus for 3D nanopatterning

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

22 Scopus Citations
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Author(s)

  • Junyong Park
  • Dongha Tahk
  • Changui Ahn
  • Sung Gap Im
  • Se-Jin Choi
  • Khap-Yang Suh

Detail(s)

Original languageEnglish
Pages (from-to)2316-2322
Journal / PublicationJournal of Materials Chemistry C
Volume2
Issue number13
Online published16 Jan 2014
Publication statusPublished - 7 Apr 2014
Externally publishedYes

Abstract

The pattern resolution of soft lithographic techniques is critically determined by the elastic modulus of the soft mold that can support fine and high-aspect-ratio features with conformal adhesion to target substrates. We present a strategy to fine-tune the elastic modulus of conformal molds made of polyurethane acrylate by optimizing the chemical structures and the composition of prepolymer and modulator. Trimethylolpropane ethoxylated (15) triacrylate plays a key role as a delicate modulator for increasing the elastic modulus of soft aliphatic urethane diacrylate oligomer with its low cross-linking density. The optimized molds have sufficiently high elastic modulus (>23 MPa) for defect-free replication of dense, high-aspect-ratio (>2) nanopillars and nanotrench structures while still preserving their conformality. The conformal mold with good mechanical and optical properties can serve as a semi-permanently usable optical phase mask with a wide range of phase modulations for generating three-dimensional (3D) nanostructures with high precision.

Citation Format(s)

Conformal phase masks made of polyurethane acrylate with optimized elastic modulus for 3D nanopatterning. / Park, Junyong; Tahk, Dongha; Ahn, Changui; Im, Sung Gap; Choi, Se-Jin; Suh, Khap-Yang; Jeon, Seokwoo.

In: Journal of Materials Chemistry C, Vol. 2, No. 13, 07.04.2014, p. 2316-2322.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal