CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS

Dominik J. Bell; Philipp Rüst; Lixin Dong; Silke Schön; Bradley J. Nelson

doi:10.1109/memsys.2007.4433178

CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS

Dominik J. Bell
, Philipp Rüst
, Lixin Dong
, Silke Schön
, Bradley J. Nelson

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

3 Citations (Scopus)

Abstract

We present the use of integrated semiconductor nanocoils for conductometric sensors. The three-dimensional structures are made of an n-type InGaAs/GaAs bilayer. They are suspended over the chip surface and connected to one electrode on each side. The process is based on conventional batch micro fabrication techniques. Process and design features that are critical for the realization of this type of device are described. High sensor performance can be achieved due to the high surface-to-volume ratio of the helical nanostructures. The use of these structures for temperature sensors and for photoconductive detectors is demonstrated.

Original language	English
Title of host publication	2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	847-850
DOIs	https://doi.org/10.1109/memsys.2007.4433178
Publication status	Published - Jan 2007
Externally published	Yes
Event	20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007)
Place	Japan
City	Kobe
Period	21/01/07 → 25/01/07

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This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1109/memsys.2007.4433178

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Bell, D. J., Rüst, P., Dong, L., Schön, S., & Nelson, B. J. (2007). CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS. In 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 847-850). Article 4433178 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/memsys.2007.4433178

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title = "CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS",

abstract = "We present the use of integrated semiconductor nanocoils for conductometric sensors. The three-dimensional structures are made of an n-type InGaAs/GaAs bilayer. They are suspended over the chip surface and connected to one electrode on each side. The process is based on conventional batch micro fabrication techniques. Process and design features that are critical for the realization of this type of device are described. High sensor performance can be achieved due to the high surface-to-volume ratio of the helical nanostructures. The use of these structures for temperature sensors and for photoconductive detectors is demonstrated.",

author = "Bell, \{Dominik J.\} and Philipp R{\"u}st and Lixin Dong and Silke Sch{\"o}n and Nelson, \{Bradley J.\}",

year = "2007",

month = jan,

doi = "10.1109/memsys.2007.4433178",

language = "English",

isbn = "1424409519",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "847--850",

booktitle = "2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) ; Conference date: 21-01-2007 Through 25-01-2007",

}

Bell, DJ, Rüst, P, Dong, L, Schön, S & Nelson, BJ 2007, CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS. in 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)., 4433178, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 847-850, 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, 21/01/07. https://doi.org/10.1109/memsys.2007.4433178

CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS. / Bell, Dominik J.; Rüst, Philipp; Dong, Lixin et al.
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 847-850 4433178 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS

AU - Bell, Dominik J.

AU - Rüst, Philipp

AU - Dong, Lixin

AU - Schön, Silke

AU - Nelson, Bradley J.

PY - 2007/1

Y1 - 2007/1

N2 - We present the use of integrated semiconductor nanocoils for conductometric sensors. The three-dimensional structures are made of an n-type InGaAs/GaAs bilayer. They are suspended over the chip surface and connected to one electrode on each side. The process is based on conventional batch micro fabrication techniques. Process and design features that are critical for the realization of this type of device are described. High sensor performance can be achieved due to the high surface-to-volume ratio of the helical nanostructures. The use of these structures for temperature sensors and for photoconductive detectors is demonstrated.

AB - We present the use of integrated semiconductor nanocoils for conductometric sensors. The three-dimensional structures are made of an n-type InGaAs/GaAs bilayer. They are suspended over the chip surface and connected to one electrode on each side. The process is based on conventional batch micro fabrication techniques. Process and design features that are critical for the realization of this type of device are described. High sensor performance can be achieved due to the high surface-to-volume ratio of the helical nanostructures. The use of these structures for temperature sensors and for photoconductive detectors is demonstrated.

UR - https://www.scopus.com/pages/publications/52249100111

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-52249100111&origin=recordpage

U2 - 10.1109/memsys.2007.4433178

DO - 10.1109/memsys.2007.4433178

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 1424409519

SN - 9781424409501

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 847

EP - 850

BT - 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007)

Y2 - 21 January 2007 through 25 January 2007

ER -

CONDUCTOMETRIC SENSORS BASED ON INGAAS/GAAS NANOCOILS

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