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Composite nanowires from ion beam modification of Si nanowires

X. T. Zhou, H. Y. Peng, N. G. Shang, N. Wang, I. Bello, C. S. Lee, S. T. Lee

Research output: Journal Publications and ReviewsRGC 22 - Publication in policy or professional journal

Abstract

Composite nanowires with typical diameters of 30-100nm, which consisted of Si, β-SiC, amorphous carbon were converted from Si nanowires by ion beam deposition. The Si nanorods were exposed to broad low energy ion beams. The low energy hydrocarbon, argon and hydrogen ions, generated in a Kaufman ion source, reacted with Si nanowires and formed the composite nanowires. It has been assumed that the reaction pathway to form the composite nanowires were driven by both thermal diffusion and kinetic energic of interacting particles.
Original languageEnglish
Pages (from-to)235-238
JournalMaterials Research Society Symposium - Proceedings
Volume581
DOIs
Publication statusPublished - 2000
EventThe 1999 MRS Fall Meeting - Symposium F 'Nanophase and Nanocomposite Materials III' - Boston, MA, USA
Duration: 29 Nov 19992 Dec 1999

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