Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition

M. Xu; X. Cai; J.  Zhao; Q. Chen; P.K. Chu

Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition

M. Xu, X. Cai, J. Zhao, Q. Chen, P.K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - Apr 2007
Event	International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007 - San Diego, United States Duration: 23 Apr 2007 → 27 Apr 2007 http://www.avs-ased.org/documents/ICMCTF_Program_2007.pdf

Conference

Conference	International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007
Place	United States
City	San Diego
Period	23/04/07 → 27/04/07
Internet address	http://www.avs-ased.org/documents/ICMCTF_Program_2007.pdf

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Research Unit(s) information for this publication is provided by the author(s) concerned.

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Xu, M., Cai, X., Zhao, J., Chen, Q., & Chu, P. K. (2007). Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition. Paper presented at International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007, San Diego, California, United States.

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title = "Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition",

author = "M. Xu and X. Cai and J. Zhao and Q. Chen and P.K. Chu",

note = "Research Unit(s) information for this publication is provided by the author(s) concerned.; International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007 ; Conference date: 23-04-2007 Through 27-04-2007",

year = "2007",

month = apr,

language = "English",

url = "http://www.avs-ased.org/documents/ICMCTF_Program_2007.pdf",

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Xu, M, Cai, X, Zhao, J, Chen, Q & Chu, PK 2007, 'Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition', Paper presented at International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007, San Diego, United States, 23/04/07 - 27/04/07.

Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition. / Xu, M.; Cai, X.; Zhao, J. et al.
2007. Paper presented at International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007, San Diego, California, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Comparative Studies of Influence of Acetylene to Argon Flow Rate Ratios on Amorphous Carbon Films Produced on Steel Substrates by Plasma Immersion Ion Implantation and Deposition

AU - Xu, M.

AU - Cai, X.

AU - Zhao, J.

AU - Chen, Q.

AU - Chu, P.K.

N1 - Research Unit(s) information for this publication is provided by the author(s) concerned.

PY - 2007/4

Y1 - 2007/4

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - International Conference on Metallurgical Coatings Thin Films, ICMCTF 2007

Y2 - 23 April 2007 through 27 April 2007

ER -