TY - JOUR
T1 - Cleanroom-Free Toolkit for Patterning Submicron-Resolution Bioelectronics on Flexibles
AU - Tao, Xudong
AU - Carnicer-Lombarte, Alejandro
AU - Dominguez-Alfaro, Antonio
AU - Gatecliff, Luke
AU - Zhang, Ji
AU - Bidinger, Sophia
AU - Keene, Scott T.
AU - Hadwe, Salim El
AU - Dong, Chaoqun
AU - Boys, Alexander J.
AU - Slaughter, Christopher
AU - Ruiz-Mateos Serrano, Ruben
AU - Chovas, Jakob
AU - Alban-Paccha, Marco Vinicio
AU - Barone, Damiano
AU - Kar-Narayan, Sohini
AU - Malliaras, George G.
PY - 2025/4/9
Y1 - 2025/4/9
N2 - Fabricating flexible bioelectronics remains an ongoing challenge in pursuing a cost-effective, efficient, scalable, and environmentally friendly approach for research and commercial applications. The current dominant method, lithography, presents challenges due to its incompatibility with solvent-sensitive biomaterials and the phase mismatch between the photoresist and flexible substrates, such as elastomers. This study proposes a simplified, cleanroom-free toolkit as a potential alternative to lithography for fabricating intricate bioelectronics on flexible substrates with submicron resolution. This technique integrates a two-photon laser writing mask, mask transfer, and multi-layer/material patterning processes, enabling batch-to-batch processing and making it suitable for scalable production. With excellent conformal patterning capability, different functional and encapsulation biomaterials can be patterned on flexible substrates, including elastomers, parylene-C, polymer sheets, skin, fabric, and plant leaves. The versatility of this toolkit is validated by fabricating various prototypes of wearable and implantable bioelectronics, demonstrating excellent performance. © 2025 The Author(s). Small published by Wiley-VCH GmbH.
AB - Fabricating flexible bioelectronics remains an ongoing challenge in pursuing a cost-effective, efficient, scalable, and environmentally friendly approach for research and commercial applications. The current dominant method, lithography, presents challenges due to its incompatibility with solvent-sensitive biomaterials and the phase mismatch between the photoresist and flexible substrates, such as elastomers. This study proposes a simplified, cleanroom-free toolkit as a potential alternative to lithography for fabricating intricate bioelectronics on flexible substrates with submicron resolution. This technique integrates a two-photon laser writing mask, mask transfer, and multi-layer/material patterning processes, enabling batch-to-batch processing and making it suitable for scalable production. With excellent conformal patterning capability, different functional and encapsulation biomaterials can be patterned on flexible substrates, including elastomers, parylene-C, polymer sheets, skin, fabric, and plant leaves. The versatility of this toolkit is validated by fabricating various prototypes of wearable and implantable bioelectronics, demonstrating excellent performance. © 2025 The Author(s). Small published by Wiley-VCH GmbH.
KW - flexible bioelectronics
KW - submicron patterning
KW - two-photon laser
UR - http://www.scopus.com/inward/record.url?scp=105002264783&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-105002264783&origin=recordpage
U2 - 10.1002/smll.202411979
DO - 10.1002/smll.202411979
M3 - RGC 21 - Publication in refereed journal
C2 - 40052621
SN - 1613-6810
VL - 21
JO - Small
JF - Small
IS - 14
M1 - 2411979
ER -