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Cleanroom-Free Toolkit for Patterning Submicron-Resolution Bioelectronics on Flexibles

Xudong Tao, Alejandro Carnicer-Lombarte, Antonio Dominguez-Alfaro, Luke Gatecliff, Ji Zhang, Sophia Bidinger, Scott T. Keene, Salim El Hadwe, Chaoqun Dong, Alexander J. Boys, Christopher Slaughter, Ruben Ruiz-Mateos Serrano, Jakob Chovas, Marco Vinicio Alban-Paccha, Damiano Barone, Sohini Kar-Narayan, George G. Malliaras*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Abstract

Fabricating flexible bioelectronics remains an ongoing challenge in pursuing a cost-effective, efficient, scalable, and environmentally friendly approach for research and commercial applications. The current dominant method, lithography, presents challenges due to its incompatibility with solvent-sensitive biomaterials and the phase mismatch between the photoresist and flexible substrates, such as elastomers. This study proposes a simplified, cleanroom-free toolkit as a potential alternative to lithography for fabricating intricate bioelectronics on flexible substrates with submicron resolution. This technique integrates a two-photon laser writing mask, mask transfer, and multi-layer/material patterning processes, enabling batch-to-batch processing and making it suitable for scalable production. With excellent conformal patterning capability, different functional and encapsulation biomaterials can be patterned on flexible substrates, including elastomers, parylene-C, polymer sheets, skin, fabric, and plant leaves. The versatility of this toolkit is validated by fabricating various prototypes of wearable and implantable bioelectronics, demonstrating excellent performance. © 2025 The Author(s). Small published by Wiley-VCH GmbH.
Original languageEnglish
Article number2411979
Number of pages11
JournalSmall
Volume21
Issue number14
Online published7 Mar 2025
DOIs
Publication statusPublished - 9 Apr 2025
Externally publishedYes

Funding

The authors would like to acknowledge the foundation of the Engineering and Physical Sciences Research Council Interdisciplinary Research Collaboration in Targeted Delivery for Hard-to-Treat Cancers (EP/S009000/1). S.K.-N. acknowledges funding from UK Research and Innovation (UKRI) under the UK government's Horizon Europe funding guarantee (EP/Y032535/1). J.Z. acknowledges support from EPSRC Cambridge NanoDTC (EP/S022953/1) and Cambridge Trust.

Research Keywords

  • flexible bioelectronics
  • submicron patterning
  • two-photon laser

Publisher's Copyright Statement

  • This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/

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