Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry

Rayan M. Al-Assaad; Suresh Regonda; Li Tao; Stella W. Pang; Wenchuang Hu

doi:10.1116/1.2800327

Author(s)

Rayan M. Al-Assaad
Suresh Regonda
Li Tao
Stella W. Pang
Wenchuang Hu

Detail(s)

Original language	English
Pages (from-to)	2396-2401
Journal / Publication	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25
Issue number	6
Publication status	Published - 2007
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1116/1.2800327 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-37148998772&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(2fc238f9-4d1d-4601-96b4-2e3a1046addb).html

Abstract

The profile shape and the flow behavior of polymer nanoscale gratings made by a thermal nanoimprint process are precisely examined using visible light angular scatterometry. Nanoimprinted poly(methyl methacrylate) (PMMA) lines with 60-800 nm width, 100-200 nm height, and varied residual thicknesses of 70-400 nm have been investigated using this optical approach, and insightful observations are made regarding residual stress buildup during thermal nanoimprint. In addition, a nonlinear profile model has been developed for scatterometry to monitor the "melting" behavior of PMMA gratings under annealing around its glass transition temperature. The polymer nanostructures were found to relax primarily at high stress regions. © 2007 American Vacuum Society.

Citation Format(s)

[ RIS ] [ BibTeX ]

Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry. / Al-Assaad, Rayan M.; Regonda, Suresh; Tao, Li et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 25, No. 6, 2007, p. 2396-2401.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Al-Assaad, RM, Regonda, S, Tao, L, Pang, SW & Hu, W 2007, 'Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 25, no. 6, pp. 2396-2401. https://doi.org/10.1116/1.2800327

Al-Assaad, R. M., Regonda, S., Tao, L., Pang, S. W., & Hu, W. (2007). Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 25(6), 2396-2401. https://doi.org/10.1116/1.2800327

Al-Assaad RM, Regonda S, Tao L, Pang SW, Hu W. Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2007;25(6):2396-2401. doi: 10.1116/1.2800327

Al-Assaad, Rayan M. ; Regonda, Suresh ; Tao, Li et al. / Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2007 ; Vol. 25, No. 6. pp. 2396-2401.