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Characterization of Ge2Sb2Te5 thin film alloys using conductive-tip atomic force microscopy

  • Chia Min Chang
  • , Yen Ju Liu
  • , Ming Lun Tseng
  • , Nien-Nan Chu
  • , Ding-Wei Huang
  • , Masud Mansuripur
  • , Din Ping Tsai

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Abstract

Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> film. © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Original languageEnglish
Pages (from-to)1945-1950
JournalPhysica Status Solidi (B) Basic Research
Volume249
Issue number10
DOIs
Publication statusPublished - Oct 2012
Externally publishedYes

Bibliographical note

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Research Keywords

  • Electronic data storage
  • Materials and process characterization
  • Optical recording
  • Phase-change materials

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