Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • C. M. Quintana
  • A. Megrant
  • Z. Chen
  • A. Dunsworth
  • B. Chiaro
  • R. Barends
  • B. Campbell
  • Yu Chen
  • E. Jeffrey
  • J. Kelly
  • J. Y. Mutus
  • P. J.J. O'Malley
  • C. Neill
  • P. Roushan
  • D. Sank
  • A. Vainsencher
  • J. Wenner
  • T. C. White
  • A. N. Cleland
  • John M. Martinis

Detail(s)

Original languageEnglish
Article number062601
Journal / PublicationApplied Physics Letters
Volume105
Issue number6
Publication statusPublished - 11 Aug 2014
Externally publishedYes

Abstract

Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces. © 2014 AIP Publishing LLC.

Bibliographic Note

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Citation Format(s)

Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits. / Quintana, C. M.; Megrant, A.; Chen, Z.; Dunsworth, A.; Chiaro, B.; Barends, R.; Campbell, B.; Chen, Yu; Hoi, I. C.; Jeffrey, E.; Kelly, J.; Mutus, J. Y.; O'Malley, P. J.J.; Neill, C.; Roushan, P.; Sank, D.; Vainsencher, A.; Wenner, J.; White, T. C.; Cleland, A. N.; Martinis, John M.

In: Applied Physics Letters, Vol. 105, No. 6, 062601, 11.08.2014.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review