Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

C. M. Quintana; A. Megrant; Z. Chen; A. Dunsworth; B. Chiaro; R. Barends; B. Campbell; Yu Chen; I.-C. Hoi; E. Jeffrey; J. Kelly; J. Y. Mutus; P. J. J. O'Malley; C. Neill; P. Roushan; D. Sank; A. Vainsencher; J. Wenner; T. C. White; A. N. Cleland; John M. Martinis

doi:10.1063/1.4893297

Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

C. M. Quintana, A. Megrant, Z. Chen, A. Dunsworth, B. Chiaro, R. Barends, B. Campbell, Yu Chen, I.-C. Hoi, E. Jeffrey, J. Kelly, J. Y. Mutus, P. J. J. O'Malley, C. Neill, P. Roushan, D. Sank, A. Vainsencher, J. Wenner, T. C. White, A. N. ClelandJohn M. Martinis^*

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

93 Citations (Scopus)

Abstract

Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces. © 2014 AIP Publishing LLC.

Original language	English
Article number	062601
Journal	Applied Physics Letters
Volume	105
Issue number	6
DOIs	https://doi.org/10.1063/1.4893297
Publication status	Published - 11 Aug 2014
Externally published	Yes

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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Quintana, C. M., Megrant, A., Chen, Z., Dunsworth, A., Chiaro, B., Barends, R., Campbell, B., Chen, Y., Hoi, I.-C., Jeffrey, E., Kelly, J., Mutus, J. Y., O'Malley, P. J. J., Neill, C., Roushan, P., Sank, D., Vainsencher, A., Wenner, J., White, T. C., ... Martinis, J. M. (2014). Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits. Applied Physics Letters, 105(6), Article 062601. https://doi.org/10.1063/1.4893297

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title = "Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits",

abstract = "Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces. {\textcopyright} 2014 AIP Publishing LLC.",

author = "Quintana, {C. M.} and A. Megrant and Z. Chen and A. Dunsworth and B. Chiaro and R. Barends and B. Campbell and Yu Chen and I.-C. Hoi and E. Jeffrey and J. Kelly and Mutus, {J. Y.} and O'Malley, {P. J. J.} and C. Neill and P. Roushan and D. Sank and A. Vainsencher and J. Wenner and White, {T. C.} and Cleland, {A. N.} and Martinis, {John M.}",

note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected]. ",

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Quintana, CM, Megrant, A, Chen, Z, Dunsworth, A, Chiaro, B, Barends, R, Campbell, B, Chen, Y, Hoi, I-C, Jeffrey, E, Kelly, J, Mutus, JY, O'Malley, PJJ, Neill, C, Roushan, P, Sank, D, Vainsencher, A, Wenner, J, White, TC, Cleland, AN & Martinis, JM 2014, 'Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits', Applied Physics Letters, vol. 105, no. 6, 062601. https://doi.org/10.1063/1.4893297

TY - JOUR

T1 - Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

AU - Quintana, C. M.

AU - Megrant, A.

AU - Chen, Z.

AU - Dunsworth, A.

AU - Chiaro, B.

AU - Barends, R.

AU - Campbell, B.

AU - Chen, Yu

AU - Hoi, I.-C.

AU - Jeffrey, E.

AU - Kelly, J.

AU - Mutus, J. Y.

AU - O'Malley, P. J. J.

AU - Neill, C.

AU - Roushan, P.

AU - Sank, D.

AU - Vainsencher, A.

AU - Wenner, J.

AU - White, T. C.

AU - Cleland, A. N.

AU - Martinis, John M.

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 2014/8/11

Y1 - 2014/8/11

N2 - Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces. © 2014 AIP Publishing LLC.

AB - Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces. © 2014 AIP Publishing LLC.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

M1 - 062601

ER -

Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

Abstract

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