Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

C. M. Quintana, A. Megrant, Z. Chen, A. Dunsworth, B. Chiaro, R. Barends, B. Campbell, Yu Chen, I.-C. Hoi, E. Jeffrey, J. Kelly, J. Y. Mutus, P. J. J. O'Malley, C. Neill, P. Roushan, D. Sank, A. Vainsencher, J. Wenner, T. C. White, A. N. ClelandJohn M. Martinis*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

93 Citations (Scopus)

Abstract

Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces. © 2014 AIP Publishing LLC.
Original languageEnglish
Article number062601
JournalApplied Physics Letters
Volume105
Issue number6
DOIs
Publication statusPublished - 11 Aug 2014
Externally publishedYes

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