Characterization and optical properties of diamondlike carbon prepared by electron cyclotron resonance plasma

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Xiao-Ming He
  • S. T. Lee
  • I. Bello
  • A. C. Cheung
  • C. S. Lee

Detail(s)

Original languageEnglish
Pages (from-to)1055-1061
Journal / PublicationJournal of Materials Research
Volume14
Issue number3
Publication statusPublished - Mar 1999

Abstract

Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature using electron cyclotron resonance CH4-Ar plasma. The effects of negative rf bias and reactant gas composition on the bonding structure, hardness, and resistivity of the films were systematically investigated. DLC films deposited on PMMA (polymethyl methacrylate) were examined by optical methods to determine the absorption coefficients and the optical band gap. It was found that DLC films synthesized at bias voltage of -(80-100) V and FCH4/FAr of 0.075-0.086 exhibit extreme hardness of more than 3000 kgf mm-2, high electrical resistivity up to 1014 Ω cm, band gap larger than 2.5 eV, and excellent optical transparency. The results indicate that ECR CH4-Ar plasma with low negative rf bias and suitable CH4/Ar gas ratio can process optically transparent and hard protective DLC films on PMMA plastics.

Citation Format(s)

Characterization and optical properties of diamondlike carbon prepared by electron cyclotron resonance plasma. / He, Xiao-Ming; Lee, S. T.; Bello, I. et al.
In: Journal of Materials Research, Vol. 14, No. 3, 03.1999, p. 1055-1061.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review