Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma

Xiao-Ming He; S. T. Lee; I. Bello; A. C. Cheung; W. Z. Li; D. S. Chiu; Y. W. Lam; C. S. Lee; K. M. Leung; X. T. Zhou

doi:10.1557/jmr.1999.0217

Author(s)

Xiao-Ming He
S. T. Lee
I. Bello
A. C. Cheung
W. Z. Li
D. S. Chiu
Y. W. Lam
K. M. Leung
X. T. Zhou

Detail(s)

Original language	English
Pages (from-to)	1617-1625
Journal / Publication	Journal of Materials Research
Volume	14
Issue number	4
Publication status	Published - Apr 1999

Link(s)

DOI	DOI https://doi.org/10.1557/jmr.1999.0217 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-0032687421&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(827fc031-6cb0-40a2-848f-66a56af26cf5).html

Abstract

Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature (approx. 60°C) using electron cyclotron resonance CH₄-Ar plasma. The structures of the resultant films were characterized by Fourier transform infrared (FTIR), Raman, and ultraviolet/visible (UV/VIS) spectrometry. The studies revealed that the deposited structures were DLC films with sp³/sp² bond hybridization, extremely high hardness (> 3000 kgf/mm²), and high electrical resistivity (up to 10¹⁴ Ω cm). The DLC films deposited on colorless (transparent) polymer plastics were examined to determine visible light transparencies and optical bandgaps. The results indicate that electron cyclotron resonance (ECR) plasma processing with low negative rf bias, low deposition temperature, and suitable CH₄/Ar gas composition can form optically visible light transparent and hard protective DLC films on polymer plastic surfaces.

Citation Format(s)

[ RIS ] [ BibTeX ]

Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma. / He, Xiao-Ming; Lee, S. T.; Bello, I. et al.
In: Journal of Materials Research, Vol. 14, No. 4, 04.1999, p. 1617-1625.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

He, X-M, Lee, ST, Bello, I, Cheung, AC, Li, WZ, Chiu, DS, Lam, YW, Lee, CS, Leung, KM & Zhou, XT 1999, 'Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma', Journal of Materials Research, vol. 14, no. 4, pp. 1617-1625. https://doi.org/10.1557/jmr.1999.0217

He, X.-M., Lee, S. T., Bello, I., Cheung, A. C., Li, W. Z., Chiu, D. S., Lam, Y. W., Lee, C. S., Leung, K. M., & Zhou, X. T. (1999). Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma. Journal of Materials Research, 14(4), 1617-1625. https://doi.org/10.1557/jmr.1999.0217

He XM, Lee ST, Bello I, Cheung AC, Li WZ, Chiu DS et al. Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma. Journal of Materials Research. 1999 Apr;14(4):1617-1625. doi: 10.1557/jmr.1999.0217

He, Xiao-Ming ; Lee, S. T. ; Bello, I. et al. / Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma. In: Journal of Materials Research. 1999 ; Vol. 14, No. 4. pp. 1617-1625.