Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma

Xiao-Ming He; S. T. Lee; I. Bello; A. C. Cheung; W. Z. Li; D. S. Chiu; Y. W. Lam; C. S. Lee; K. M. Leung; X. T. Zhou

doi:10.1557/jmr.1999.0217

Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma

Xiao-Ming He, S. T. Lee, I. Bello, A. C. Cheung, W. Z. Li, D. S. Chiu, Y. W. Lam, C. S. Lee, K. M. Leung, X. T. Zhou

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

11 Citations (Scopus)

Abstract

Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature (approx. 60°C) using electron cyclotron resonance CH₄-Ar plasma. The structures of the resultant films were characterized by Fourier transform infrared (FTIR), Raman, and ultraviolet/visible (UV/VIS) spectrometry. The studies revealed that the deposited structures were DLC films with sp³/sp² bond hybridization, extremely high hardness (> 3000 kgf/mm²), and high electrical resistivity (up to 10¹⁴ Ω cm). The DLC films deposited on colorless (transparent) polymer plastics were examined to determine visible light transparencies and optical bandgaps. The results indicate that electron cyclotron resonance (ECR) plasma processing with low negative rf bias, low deposition temperature, and suitable CH₄/Ar gas composition can form optically visible light transparent and hard protective DLC films on polymer plastic surfaces.

Original language	English
Pages (from-to)	1617-1625
Journal	Journal of Materials Research
Volume	14
Issue number	4
DOIs	https://doi.org/10.1557/jmr.1999.0217
Publication status	Published - Apr 1999

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@article{827fc0316cb040a2848f66a56af26cf5,

title = "Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma",

abstract = "Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature (approx. 60°C) using electron cyclotron resonance CH4-Ar plasma. The structures of the resultant films were characterized by Fourier transform infrared (FTIR), Raman, and ultraviolet/visible (UV/VIS) spectrometry. The studies revealed that the deposited structures were DLC films with sp3/sp2 bond hybridization, extremely high hardness (> 3000 kgf/mm2), and high electrical resistivity (up to 1014 Ω cm). The DLC films deposited on colorless (transparent) polymer plastics were examined to determine visible light transparencies and optical bandgaps. The results indicate that electron cyclotron resonance (ECR) plasma processing with low negative rf bias, low deposition temperature, and suitable CH4/Ar gas composition can form optically visible light transparent and hard protective DLC films on polymer plastic surfaces.",

author = "Xiao-Ming He and Lee, {S. T.} and I. Bello and Cheung, {A. C.} and Li, {W. Z.} and Chiu, {D. S.} and Lam, {Y. W.} and Lee, {C. S.} and Leung, {K. M.} and Zhou, {X. T.}",

year = "1999",

month = apr,

doi = "10.1557/jmr.1999.0217",

language = "English",

volume = "14",

pages = "1617--1625",

journal = "Journal of Materials Research",

issn = "0884-2914",

publisher = "Springer International Publishing ",

number = "4",

}

TY - JOUR

T1 - Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma

AU - He, Xiao-Ming

AU - Lee, S. T.

AU - Bello, I.

AU - Cheung, A. C.

AU - Li, W. Z.

AU - Chiu, D. S.

AU - Lam, Y. W.

AU - Lee, C. S.

AU - Leung, K. M.

AU - Zhou, X. T.

PY - 1999/4

Y1 - 1999/4

N2 - Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature (approx. 60°C) using electron cyclotron resonance CH4-Ar plasma. The structures of the resultant films were characterized by Fourier transform infrared (FTIR), Raman, and ultraviolet/visible (UV/VIS) spectrometry. The studies revealed that the deposited structures were DLC films with sp3/sp2 bond hybridization, extremely high hardness (> 3000 kgf/mm2), and high electrical resistivity (up to 1014 Ω cm). The DLC films deposited on colorless (transparent) polymer plastics were examined to determine visible light transparencies and optical bandgaps. The results indicate that electron cyclotron resonance (ECR) plasma processing with low negative rf bias, low deposition temperature, and suitable CH4/Ar gas composition can form optically visible light transparent and hard protective DLC films on polymer plastic surfaces.

AB - Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature (approx. 60°C) using electron cyclotron resonance CH4-Ar plasma. The structures of the resultant films were characterized by Fourier transform infrared (FTIR), Raman, and ultraviolet/visible (UV/VIS) spectrometry. The studies revealed that the deposited structures were DLC films with sp3/sp2 bond hybridization, extremely high hardness (> 3000 kgf/mm2), and high electrical resistivity (up to 1014 Ω cm). The DLC films deposited on colorless (transparent) polymer plastics were examined to determine visible light transparencies and optical bandgaps. The results indicate that electron cyclotron resonance (ECR) plasma processing with low negative rf bias, low deposition temperature, and suitable CH4/Ar gas composition can form optically visible light transparent and hard protective DLC films on polymer plastic surfaces.

UR - http://www.scopus.com/inward/record.url?scp=0032687421&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0032687421&origin=recordpage

U2 - 10.1557/jmr.1999.0217

DO - 10.1557/jmr.1999.0217

M3 - RGC 21 - Publication in refereed journal

SN - 0884-2914

VL - 14

SP - 1617

EP - 1625

JO - Journal of Materials Research

JF - Journal of Materials Research

IS - 4

ER -

Characterization and optical investigation of diamondlike carbon prepared by electron cyclotron resonance plasma

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