Abstract
Buried channel wave guides have been fabricated from thermally stable non linear optical polyimides. The material system consists of a polyimide cladding and a polyimide based active material. The buried channel wave guides are fabricated by a trench and fill process. This process was used for the fabrication of active wave guides at process temperatures above 300 °C. Single mode wave guides, and Mach-Zenhder interferometers, were fabricated with attenuation
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium Proceedings |
| Publisher | Publ by Materials Research Society |
| Pages | 511-516 |
| Volume | 328 |
| ISBN (Print) | 1558992278 |
| Publication status | Published - 1994 |
| Externally published | Yes |
| Event | 1993 Materials Research Society (MRS) Fall Meeting - Boston, MA, United States Duration: 29 Nov 1993 → 3 Dec 1993 https://www.mrs.org/fall1993 |
Publication series
| Name | |
|---|---|
| Volume | 328 |
| ISSN (Electronic) | 0272-9172 |
Conference
| Conference | 1993 Materials Research Society (MRS) Fall Meeting |
|---|---|
| Place | United States |
| City | Boston, MA |
| Period | 29/11/93 → 3/12/93 |
| Internet address |
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